「IMW2022」3D NANDの最前線 〜EUV適用から、液体窒素冷却の7ビット/セルまで

図14　液体窒素温度で6ビット/セルの動作に成功した3D NAND 出所：Tomoya Sanuki et al.（KIOXIA）, “Cryogenic Operation of 3-D Flash Memory for Storage Performance Improvement and Bit Cost Scaling.”, IEEE Journal on Exploratory Solid-State Computational Devices and Circuits ( Volume: 7, Issue: 2, Dec. 2021), FIGURE 13.

図14　液体窒素温度で6ビット/セルの動作に成功した3D NAND 出所：Tomoya Sanuki et al.（KIOXIA）, “Cryogenic Operation of 3-D Flash Memory for Storage Performance Improvement and Bit Cost Scaling.”, IEEE Journal on Exploratory Solid-State Computational Devices and Circuits ( Volume: 7, Issue: 2, Dec. 2021), FIGURE 13.